Utility Total Solution
- P-V(PROCESS VACUUM) SYSTEM
- PCW(PROCESS COOLING WATER)SYSTEM
- GAS SYSTEM
- CDA(CLEAN DRY AIR)SYSTEM
- DI WATER SYSTEM
- EXHAUST SYSTEM
The origin of vacuum is a Greek word meaning empty. In fact, a vacuum container exposed to the air is used with a few vacuum systems to remove air. Therefore, the strength of vacuum is determined by the amount of air removed by the vacuum container.
It is realistically impossible to acquire a vacuum container with no air inside. If this is possible, it would be called complete or absolute vacuum. The vacuum system is generally classified by the operating pressure.
PCW(PROCESS COOLING WATER)SYSTEM
Cooling water systems generally have three drawbacks: corrosion, scale, and slime. These drawbacks cause problems related to shorter lifespan, lower efficiency, product leakage, and higher processing cost. Therefore, use of cooling water, water quality analysis, and condition of cooling tower can be surveyed to adopt the right water treating systems and programs to prevent the problems.
Various kinds of special gas is used in the semiconductor making process and it requires professional technology as it demands high-purity precision.
- General Use of Gas
- A large quantity of gas is used for purge and atmosphere, but unwanted O₂ in N₂ creates an oxidized barrier to lower quality and it is necessary to reduce the O₂ moisture level to below 1 ppm.
CDA(CLEAN DRY AIR)SYSTEM
Various operations take place using the power when pressurized air loses pressure, and this is widely used in everyday life. The strength of pressurized air required for ventilating the subways, mines, or buildings is about 0.1kg/cm², for coke combustion in steelworks or casting plants is 0.5~1kg/cm², for transporting cement or fine powder and grains through pipes is 0.5~1kg/cm², for air hammers, air drills, and revet hammers is 7kg/cm², for braking railroad cars or operating door engines is 7kg/cm², and for spraying fuels for diesel engines is 50kg/cm². For a special purpose, 100~150kg/cm² pressurized air is used for submarines. The engine using pressurized air never ignites, so it is used in mines or chemical plants where there is the risk of explosion. The types include steam engine type, molded crank rotating type, molded cylinder rotating type, gear type, and rotating wing type.
DI WATER SYSTEM
Super-pure water is essential for manufacturing semiconductors and it is used for dissolving photoregister, etching, removing photoregister, and cleaning. About 1.2 tons of super-pure water is used per 6-in wafer. The super-pure system consists of the pre-treatment system (removing suspended and organic matters in source water) and primary purification sub-system, which is divided into ion exchanger (removing electrolytes) and reverse osmotic system (removing extra organic matters). Also, pre-treatment system includes coagulation, deposition, filtering, active carbon filtering, and absorption systems. The Sub-System includes UV sterilizer, cartridge polisher, and UF system and removes micro impurities (micro particles and viable cell electrolytes).
Exhaust generally refers to all systems that discharge contaminated air from the inside. It discharges the combusted gas in the cylinder and consists of exhaust engine, catalyst converter, exhaust pipe, and noise reducer. The exhaust engine collects the gas discharged from each cylinder and the catalyst converter converts the harmful materials in exhaust gas to carbon dioxide or water to minimize air pollution. Also, noise reducer reduces pressure and temperature to reduce the noise from rapid expansion of exhaust.